Novel Pre-oxidation Patterning on Thin Aluminium Film Generating Ordered Nanopores through Anodization
نویسندگان
چکیده
منابع مشابه
Novel pre-oxidation pattering on thin aluminum film generating ordered nanopores through anodization
Anodic Aluminum Oxide (AAO) is widely employed as a template for fabrication of nanowires and nanotubes due to its ability to generate self organized (SO), well ordered pore structures. We have developed a new aluminum pre-patterning technique to create well ordered nanopore arrays on thin films deposited on silicon substrates. We form patterns of thicker oxide on the surface via local oxidatio...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2010
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-1258-q05-01